A state- of- the- art facility for interdisciplinary research in nanoscience and applied nanotechnology. Because the datasheet spectral absorption bands of the photoinitiator do not abruptly terminate at a particular wavelength, a correspondingly adapted dose can also be exposed at wavelengths of some 10. MATERIAL SAFETY DATA SHEET MICROPOSIT S1813 PHOTO RESIST 41280 4. STABILITY AND REACTIVITY Chemical stability Stable under normal conditions. Exact process parameters are datasheet application and equipment dependent. MICROPOSIT™ S1805™ G2 POSITIVE PHOTORESIST Page 6 of s1805 11 Revision Date 07/ photoresist 02/ VOC’ s 642 - 1 038 g/ L NOTE: The physical data presented above are typical values should not be s1805 construed as a specification. S1805 photoresist datasheet. smartfabgroup free database of commercially available near UV ( g- h- i line and broadband) photoresists with active links to datasheets smartfabgroup™ - Photoresist Database Products ACCIDENTAL RELEASE MEASURES Spill Procedures Contain sand , absorb using earth other inert material. SUBSTRATE photoresist PREPARATION MICROPOSIT S1800 G2 Series Photoresist work well.
S1813 Spin Coating This resist allows thicknesses from 1. With Shipley 1813, 2 standard thicknesses have been chosen to be used in the MicroFab: 1. Spin Coat Wafers with S1805 a. When wafers reach room temperature, load a wafer on a prepped Headway or Brewer spin Coater. Choose the proper recipe, recipe 5 for the Headway spinner and recipe 6 for the Brewer spinner, and press start. Shipley 1805 ( positive photoresist) Shipley 1805 photoresist gives an approx.
s1805 photoresist datasheet
film thickness = 500nm, and is best suited for features that are 3um wide or less in the mask. HMDS prime the wafer for 5~ 10mins after dehydrating the wafers in VWR for 10~ 15mins.